Nanopillar Diffraction Gratings by Two-Photon Lithography
- Two-dimensional photonic structures such as nanostructured pillar gratings are useful for various applications including wave coupling, diffractive optics, and security features. Two-photon lithography facilitates the generation of such nanostructured surfaces with high precision and reproducibility. In this work, we report on nanopillar diffraction gratings fabricated by two-photon lithography with various laser powers close to the polymerization threshold of the photoresist. As a result, defect-free arrays of pillars with diameters down to 184 nm were fabricated. The structure sizes were analyzed by scanning electron microscopy and compared to theoretical predictions obtained from Monte Carlo simulations. The optical reflectivities of the nanopillar gratings were analyzed by optical microscopy and verified by rigorous coupled-wave simulations.
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| Document Type: | Article |
|---|---|
| Author: | Julia Purtov, Peter Rogin, Andreas Verch, Villads Egede JohansenORCiD, René HenselORCiD |
| URN: | urn:nbn:de:bsz:291:415-4379 |
| URL: | https://www.mdpi.com/2079-4991/9/10/1495 |
| DOI: | https://doi.org/10.3390/nano9101495 |
| ISSN: | 2079-4991 |
| Parent Title (English): | Nanomaterials |
| Volume: | 9 |
| Issue: | 10 |
| Pagenumber: | 1495 |
| Language: | English |
| Year of first Publication: | 2019 |
| Release Date: | 2022/11/18 |
| Tag: | direct laser writing; nanostructures; optical pillar gratings; photonic crystals; two-photon lithography |
| Impact: | 04.324 (2019) |
| Funding Information: | European Research Council (340929) Directorate-General for Migration and Home Affairs (701455) |
| Scientific Units: | Functional Microstructures |
| Innovative Electron Microscopy | |
| Optical Materials | |
| Open Access: | Open Access |
| Signature: | INM 2019/126 |
| Licence (German): |  Creative Commons - CC BY - Namensnennung 4.0 International |
